Microstructure Research: Cleanroom Linz
G. Bauer, H. Heinrich, H. Thim
Institut für Halbleiterphysik, Abteilung Festkörperphysik des Instituts für Experimentalphysik, and Institut für Mikroelektronik,
Johannes Kepler Universität Linz, A-4040 Linz, Austria
The main activities in the two cleanrooms in Linz supported by the GMe are described. The main research areas are the molecular beam epitaxy growth of Si based heterostructures, the MBE growth of selenides and of tellurides, as well as the MOCVD growth of GaAs based heterostructures for microwave device applications. Several in-situ as well as ex-situ characterization methods like reflection high energy electron diffraction, UHV scanning tunneling microscopy, Auger electron microscopy are used to establish the structural quality of the epitaxial layers. Lateral patterning by photolithography, electron beam lithography and reactive ion etching is used for the fabrication of low dimensional structures as well as for device research.
Nanofabrication of II-VI Heterostructures and of Si/SiGe Quantum Well Structures and Their Characterization
(G. Brunthaler, A.A. Darhuber, H. Straub, J. Stangl, Yan Zhuang, S. Zerlauth, T. Grill, G. Bauer)
Nanostructures defined by holographic lithography or by electron beam lithography were fabricated by reactive ion etching methods. In II-VI heterostructures like CdZnSe/ZnSe photoluminescence of periodic quantum wire and quantum dot patterns was observed down to feature sizes of about 40 nm and analyzed taking into account the elastic relaxation properties of strained nanostructures.
Periodic Si/SiGe structures were so far fabricated by holographic lithography and reactive ion etching and structurally characterized with respect to their elastic strain fields by x-ray diffraction methods.
Furthermore self-organized Ge islands (dots) grown by MBE as multilayers embedded in a Si matrix were studied with respect to their structural properties. For any kind of device application dot multilayers will be required in order to achieve a sufficiently high density in a given volume. The advantage of dots in comparison to two dimensional Si/SiGe structures is the fact that within the Ge dots a much higher strain status can be achieved in comparison to 2D SiGe layers, since the partial elastic relaxation in the three dimensional structures may inhibit the formation of misfit dislocations.
Selected references: [1] [4]
Surface Analysis of II-VI Compounds by Auger Electron Spectroscopy
(E. Wirthl, M. Schmid, H. Sitter, H. Straub, G. Brunthaler)
Several II-VI compounds grown by molecular beam and by atomic layer epitaxy were investigated by quantitative Auger electron spectroscopy. Particularly for ternary and quaternary II-VI compounds, which are indispensable for any realization of a II-VI compounds based heterostructure laser, an exact control of chemical composition is required. Furthermore, in the fabrication process of such devices, reactive ion etch processes are required. In this context a study of the surface composition using depth profiling methods with compounds like ZnSe, CdSe, ZnTe and CdTe was performed, after reactive ion etching using a mixture of CH4 and H2. Furthermore the incorporation of oxygen as well as of carbon during these etching steps was studied.
Selected references: [5] [9]
Intersubband Absorption in Quantum Wells and Superlattices
(M. Helm, P. Kruck, W. Hilber, T. Fromherz, V. Nikonorov)
Si/SiGe as well as GaAs/AlGaAs structures suitable for the investigation of intersubband absorption were fabricated using optical photolithography, reactive ion etching as well as the facilities for preparing contacts.
In p-doped Si/SiGe multi-quantum well structures, the polarization dependence of the intersubband absorption has been investigated theoretically as well as experimentally. A 6x6 Luttinger-Kohn band structure calculation was performed and the theoretical results were applied for the design of a mid-infrared quantum well photodetector (QWIP). The Si/SiGe detector characteristics were investigated and found to be not inferior to those reported previously for p-type GaAs/GaAlAs based QWIPs.
In asymmetric Si/SiGe MQW structures, the second harmonic frequency generation was studied. A frequency doubling of CO2 laser radiation could be demonstrated. The optical nonlinearity is due to the asymmetry of the QW structure, which causes a non-linear susceptibility of second order.
In GaAs/GaAlAs superlattices the energy relaxation of hot carriers was investigated by comparing infrared absorption spectra taken at high electric fields at low temperatures with those recorded at different lattice temperatures.
Finally, GaAs/GaAlAs structures for the investigation of the Wannier-Stark effect were fabricated. In sufficiently large vertical electrical fields, minibands split into a ladder, a phenomenon which was studied by infrared absorption.
Selected references: [10] [14]
(Ch. Penn, F. Schäffler, S. Zerlauth; J. Stangl, A.A. Darhuber, G. Bauer)
Single and multiquantum well structures of Si/Si1-yCy, Si/Si1-xGex, Si/Si1-x-yGexCy, Si1-xGex/Si1-yCy/Si were grown by molecular beam epitaxy. Their structural properties were investigated by x-ray rocking curves and their electronic properties were assessed by photoluminescence. Optimum growth temperatures with respect to carbon incorporation and layer quality were found to be around 500 °C.
PL signals from single layers, single quantum wells and multi-quantum wells were observed for carbon contents up to 1.7%. Annealing experiments were performed at temperatures up to 850 °C in order to investigate the thermal stability of the carbon containing structures. Above this temperature the substitutional carbon concentration decreases as evidenced from x-ray diffraction data.
Si1-xGex/Si1-yCy/Si multilayers were investigated with respect to their interface roughness using x-ray reflectivity measurements performed at the Optics Beamline of the ESRF, Grenoble. It turned out that the use of a antimony as a surfactant during growth appreciable decreases the interface roughness and results in a substantially longer vertical correlation length.
Selected references: [15] [18]
Scanning Tunneling Microscopy Observation of Stress Driven Surface Diffusion due to Localized Strain Fields and of Initial Stages of Heteroepitaxial Growth
(G. Springholz, A.Y. Ueta, G. Bauer)
Using in-situ scanning tunneling microscopy the influence of localized strain fields of misfit dislocations on epitaxial growth has been studied in molecular beam epitaxy. Pronounced surface deformations caused by single dislocations and dislocation reactions were observed, in good agreement with calculations based on elasticity theory. Due to the local reduction of strain energy at the surface above the interfacial dislocations, ridgelike structures are formed, due to stress-driven surface diffusion during MBE growth. These observations prove the preferential epitaxial growth at surface sites above dislocations.
The initial stages of the MBE growth of PbTe on BaF2 were studied using UHV-STM and atomic force microscopy. The PbTe growth is totally dominated by growth spirals formed around threading dislocations. With increasing layer thickness, due to dislocation annihilation, the threading dislocation density decreases substantially which results in a dramatic increase of the electron mobilities in the layers.
Selected publications: [19] [22]
Acknowledgments
The work in the clean rooms in Linz has been further supported by several projects from the FWF, Vienna, the Österreichische Nationalbank, the Projektforschung des BMfWVK, and a research fund from Daimler Benz Research Ulm.
[1] A.A. Darhuber, V. Holy, G. Bauer, P.D. Wang, Y.P. Song, C.M. Sotomayor Torres, M.C. Holland, "Quantitative analysis of elastic strains in GaAs/AlAs quantum dots", Physica B 227, 11 (1996).
[2] H. Straub, G. Brunthaler, W. Faschinger, G. Bauer, C. Vieu, "Photoluminescence of CdZnSe/ZnSe quantum well structures fabricated by reactive ion etching", J. Crystal Growth 159, 451 (1996).
[3] A.A. Darhuber, V. Holy, J. Stangl, G. Bauer, et al., "Lateral and vertical ordering in multilayered self-organized InGaAs quantum dots studied by high resolution x-ray diffraction", Appl.Phys.Lett., in print (Feb.1997).
[4] A.A. Darhuber, J. Stangl, G. Bauer, P. Schittenhelm, G. Abstreiter, "X-ray diffraction and reflection from self-assembled dots", Thin Solid Films, in print.
[5] E. Wirthl, H. Straub, M. Schmid, H. Sitter, P. Bauer, G. Brunthaler, "AES analysis of plasma-etched ZnSe", J.Cryst.Growth 159, 746 (1996).
[6] E. Wirthl, M. Schmid, D. Stifter, H. Sitter, P. Bauer, "Auger investigations on II-VI ternary compound semiconductors", J.Cryst.Res. and Technology 31, 297 (1996).
[7] E. Wirthl, H. Sitter, P. Bauer, "Determination of Auger-sensitivity factors in Zn1-xMgxTe for quantitative Surface analysis", Materials Science B, (1997), in print.
[8] E. Wirthl, H. Straub, H. Sitter, G. Brunthaler, M. Schmid, D. Stifter, P. Bauer, "AES investigations of plasma-etched II-VI binary compounds", Proc.Int.Symp. Blue Laser and Light emitting diodes, Chiba, Japan 1996, (Ohmsda Ltd IOS Press Inc.).
[9] S. Ferreira, H. Sitter, R. Krump, W. Faschinger, G. Brunthaler, "Room temperature blue electroluminescence from ZnMgCdSe quaternary system", J. Crystal Growth 159, 640 (1996).
[10] T. Fromherz, P. Kruck, M. Helm, G. Bauer, J.F. Nützel, G. Abstreiter, "TM and TE polarized intersubband absorption and photoconductivity in p-type SiGe quantum wells", Appl.Phys.Lett. 68, 3611 (1996).
[11] P. Kruck, M. Helm, T. Fromherz, G. Bauer, J.F. Nützel, G. Abstreiter, "Medium wavelength normal incidence p-type Si/SiGe quantum well infrared photodetector with background limited performance up to 85 K", Appl.Phys.Lett. 69, 3372 (1996).
[12] P. Kruck, M. Seto, M. Helm, Z. Moussa, P. Boucaud, F.-H. Julien, J.-M. Lourtioz, J.F. Nützel, G. Abstreiter, "Second order susceptibilities related to valence band transitions in asymmetric Si/SiGe quantum wells" Solid State Electronics 40, 763 (1996).
[13] W. Hilber, M. Helm, K. Alavi, R.N. Pathak, "Hot-electron power loss in doped GaAs/GaAlAs superlattices measured by infrared differential spectroscopy", Appl.Phys.Lett. 69, 2528 (1996).
[14] W. Hilber, M. Helm, F.M. Peeters, K. Alavi, R.N. Pathak, "Impurity-band and magnetic-filed-induced metal-insulator-transition in a doped GaAs/GaAlAs superlattice", Phys.Rev.B 53, 6919 (1996).
[15] W. Faschinger, S. Zerlauth, G. Bauer, L. Palmetshofer, Appl.Phys.Lett. 67, 3933 (1995).
[16] S. Zerlauth, J. Stangl, A.A. Darhuber, V. Holy, G. Bauer; F. Schäffler, "MBE growth and structural characterization of Si 1-y Cy/Si1-xGex superlattices", J.Cryst.Growth, in print.
[17] J. Stangl, S. Zerlauth, V. Holy, W. Faschinger, G. Bauer, "Reciprocal space mapping of Si1-xCx epilayers and Sin/C/Sin superlattices", Il Nuovo Cimento, in print.
[18] J. Stangl, A.A. Darhuber, V. Holy, S. Zerlauth, F. Schäffler, G. Bauer, "Interface roughness in pseudomorphic SiGe/SiC superlattices", Proc. Int. Conf. Phys. Semicond., Berlin 1996.
[19] G. Springholz, G. Bauer, V. Holy, Phys.Rev.B 54, 4500 (1996).
[20] G. Springholz, "Strain contrast in scanning tunneling microscopy imaging of surface dislocations in lattice mismatched heteroepitaxy", Applied Surface Science, in print.
[21] G. Springholz, A.Y. Ueta, N. Frank, G. Bauer, Appl.Phys.Lett. 69, 2822 (1996).
[22] G. Springholz, "Surface modifications due to strain relaxation in lattice mismatched heteroepitaxy", Festkörperprobleme, Vol. 35, ed. R. Helbig, Vieweg, Braunschweig/Wiesbaden) Vol.35, p.277 (1996).
Project Information
Project Manager
Univ.-Prof. Dr. Günther Bauer
Institut für Halbleiterphysik, Johannes Kepler Universität Linz, A-4040 Linz
Project Group
Last Name |
First Name |
Status |
Remarks |
Bonanni |
Alberta |
dissertation |
|
Brunthaler |
Gerhard |
Ph.D. |
|
Darhuber |
Anton |
dissertation |
|
Fünfstück |
Britta |
diploma student |
|
Helm |
Manfred |
assistant professor |
|
Hilber |
Wolfgang |
dissertation |
|
Kainz |
Ursula |
technician |
|
Köck |
Franz |
diploma student |
|
Kolmhofer |
Gerald |
diploma student |
|
Kruck |
Peter |
dissertation |
|
Li |
Jianhua |
Ph.D. |
|
Rabeder |
Klaus |
technician |
|
Schäffler |
Friedrich |
associate professor |
|
Schmid |
Michael |
diploma student |
|
Seyringer |
Heinz |
dissertation |
|
Sitter |
Helmut |
assistant professor |
|
Springholz |
Gunther |
Ph.D. |
|
Stangl |
Julian |
dissertation |
|
Steinbacher |
Günther |
diploma student |
|
Stifter |
David |
dissertation |
|
Straub |
Hubert |
dissertation |
GMe funding |
Ueta |
Yukio |
dissertation |
|
Wirtl |
Elisabeth |
technician |
50 % GMe funding |
Zerlauth |
Stefan |
dissertation |
|
Zhuang |
Yan |
dissertation |
Books and Contributions to Books
Publications in Reviewed Journals
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